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                         DATA AND RESULTS FILES


INPUT FILES:
                 Focusing Conditions...............         RV.dat
                 Magnetic lens(es).................    objmln2.axb
                 Electrostatic lens(es)............       oen1.axv
OUTPUT FILES:
                 Paraxial Rays.....................         RV.ray
                 Optical Properties................         RV.res


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                                TITLES


3 NM SPOT AT 500 EV
 
obj. mlens n2
oen1


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                            INPUT DATA VALUES



 IMAGING CONDITIONS DATA:


      OBJECT PLANE .......................... Zo(mm)   =   -330.2637

      FINAL IMAGE PLANE ..................... Zi(mm)   =      0.0000

      REAL APERTURE POSITION ................ Zap(mm)  =   -128.0000
      REAL APERTURE DIAMETER ................ Dap(mm)  =      0.0400

      APERTURE ANGLE AT IMAGE PLANE ......... Ai(mrad) =     24.1067
      APERTURE ANGLE AT OBJECT PLANE ........ Ao(mrad) =      0.0989
      SOURCE SIZE ........................ So(microns) =      0.0200
      BEAM SIZE AT IMAGE PLANE ............... Bi (mm) =      0.0000
      BEAM SIZE AT OBJECT PLANE .............. Bo (mm) =      0.0000
      FIELD SIZE FOR MAIN DEFLECTION ........ M (mm)   =      0.0000
      FIELD SIZE FOR SUB  DEFLECTION ........ S (mm)   =      0.0000
      FIELD SIZE FOR TERTIARY DEFLECTION .... T (mm)   =      0.0000


      BEAM VOLTAGE AT IMAGE PLANE ........... V(Volts) =   1000.0000
      BEAM VOLTAGE RIPPLE (PEAK-PEAK) ...... DV(Volts) =      0.7000



 OPTICAL ELEMENTS DATA:

                                     AXIAL    RELATIVE  SIZE SCALE    ROTATION
                                  POSITION    STRENGTH      FACTOR       ANGLE
                                      (mm)                           (degrees)

            MAGNETIC LENS 1         4.0000      1.0000      1.0000       -

            ELECTRIC LENS 1         0.0000       -          1.0000       -


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       FIELD AND DRIFT REGIONS AND NUMBER OF INTERVALS FOR COMPUTATION



 TOTAL NUMBER OF INTERVALS FOR COMPUTATION             =        2000

  FIELD REGIONS:
   1: ( -156.0000 mm ~     0.0000 mm) NO. OF INTERVALS =        2000



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                         FIRST-ORDER PROPERTIES


 FOCUSING PROPERTIES:

      MAGNETIC LENS No. 1       EXCITATION  (Ampturns)   =   2430.2336



      ELECTROSTATIC LENS No. 1  ELECTRODE-1    (Volts)   =  15000.0000
                                ELECTRODE-2    (Volts)   =   5000.0000
                                ELECTRODE-3    (Volts)   =   1000.0000



      ANGULAR MAGNIFICATION ..........................   =   -243.7943
      MAGNIFICATION ..................................   =     -0.0159
      ROTATION ANGLE ....................    (degrees)   =    136.5179









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        ABERRATIONS AT CORNERS OF DEFLECTION FIELD   (in microns)



                                 NORMAL         4-FOLD


 SPHERICAL ABERRATION ...................................         0.00139
 

 COMA ...................................................         0.00000

 

 FIELD CURVATURE.........................................         0.00000


 

 ASTIGMATISM.............................................         0.00000


 

 DISTORTION..............................................         0.00000



 

 CHROMATIC AB............................................         0.00349

            AXIAL               0.00349           -  



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 BEAM BLUR BEFORE DC:           0.00375        0.00000            0.00375

 BEAM BLUR AFTER  DC:           0.00375        0.00000            0.00375


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                  BEAM SPOT DIAMETER ON AXIS (MICRONS)

 GAUSSIAN IMAGE SIZE Dg (M*So)                           =     0.000318
 SPHERICAL AB. DISC  Ds (0.5*Cs*Ai*Ai*Ai)                =     0.001394
 CHROMATIC AB. DISC  Dc (0.5*CC*Ai*dV/Vi)                =     0.001743
 DIFFRACTION DISC    Dd (0.75*1.22*Lambda/Ai)            =     0.001472
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 BEAM SPOT DIAMETER  D (sqrt[Dg*Dg+Ds*Ds+Dc*Dc+Dd*Dd])   =     0.002693

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                ABERRATION COEFFICIENTS   (in S.I. units)



                                ISOTROPIC      ANISOTROPIC     FUNCTIONAL
                                   PART            PART        DEPENDENCE

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 SPHERICAL ABERRATION          1.99047e-04     0.00000e+00      A  A  Ac 

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 ***** COMA *****


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 ***** FIELD CURVATURE *****


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 ***** ASTIGMATISM *****


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 ***** DISTORTION *****


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 ***** CHROMATIC AB *****


 AXIAL                        -2.06608e-04     0.00000e+00      A  DV/V


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